 | 平面鏡和反射鏡固定架
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RLE systems containing retroreflector configured detector heads already contain the necessary retroreflector target optic(s). For applications that use a standard double pass or differential interferometer configuration, Renishaw can, if requested, supply plane mirror optics and adjustable mirror mounts. Plane mirrors
Summary plane mirror specification
Mirror mounts
These mounts provide up to ±2.5° yaw adjustment and ±1° pitch adjustment. (Actual adjustment range is dependent on mirror length.) Renishaw supplied mirror mounts are not vacuum compatible.
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To complete an RLE interferometer system requires only one additional, external optical component fitted to each motion system axis. (When using the differential interferometer, optics are required on the motion system and a fixed reference point e.g. column or tool.)
Renishaw supplied plane mirrors are manufactured on a Zerodur® (or similar) substrate and have a hard oxide dielectric coating.
To enable mirrors to be mounted and correctly aligned to the motion system, Renishaw can also provide adjustable mounts for use with mirrors up to 350 mm in length, which have a cross section of 25 mm x 25 mm.